Poly蝕刻步驟如何Monitor? 試說明其Monitor項目及方法

(1) Break etch: E/R on Si and SiO2, Particle。 (2) Main etch: E/R on Si and PR for main Poly etching, particle, E/P. (3) Over etch: E/R on Si and SiO2 for poly over-etching 

回答于 2018-08-25 11:46